Simulation of coupled sputter-diffusion effects
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Physica Scripta
سال: 2016
ISSN: 0031-8949,1402-4896
DOI: 10.1088/0031-8949/t167/1/014023